In this paper, we report vertical etching of poly-ethylene-terephtalate plastic substrates by means of a chemical solvent and in the presence of ultra-violet illumination. Since the PET substrate is not dissolved in solvent without a UV source, only the desired areas with proper opening for UV exposure are removed in a vertical fashion. The etch rate varies between 1 and 8 micrometer per minute, depending on the process conditions. Various structures such as micro-gears and interdigital structures have been realized using this approach. Combining this method with electroplating, the fabrication of micro-motors, micro-valves and optical devices would be possible.
Izadi,N , Samak,A and Mohajerzadeh,S . (2013). ریز ماشینکاری PET با استفاده از لایه برداری شیمیایی در حضور. Journal of Algorithms and Computation, 41(5), 567-576. doi: 10.22059/jac.2013.7879
MLA
Izadi,N , , Samak,A , and Mohajerzadeh,S . "ریز ماشینکاری PET با استفاده از لایه برداری شیمیایی در حضور", Journal of Algorithms and Computation, 41, 5, 2013, 567-576. doi: 10.22059/jac.2013.7879
HARVARD
Izadi N, Samak A, Mohajerzadeh S. (2013). 'ریز ماشینکاری PET با استفاده از لایه برداری شیمیایی در حضور', Journal of Algorithms and Computation, 41(5), pp. 567-576. doi: 10.22059/jac.2013.7879
CHICAGO
N Izadi, A Samak and S Mohajerzadeh, "ریز ماشینکاری PET با استفاده از لایه برداری شیمیایی در حضور," Journal of Algorithms and Computation, 41 5 (2013): 567-576, doi: 10.22059/jac.2013.7879
VANCOUVER
Izadi N, Samak A, Mohajerzadeh S. ریز ماشینکاری PET با استفاده از لایه برداری شیمیایی در حضور. J. Algo. Comp.. 2013;41(5):567-576. doi: 10.22059/jac.2013.7879
