In this paper, we report vertical etching of poly-ethylene-terephtalate plastic substrates by means of a chemical solvent and in the presence of ultra-violet illumination. Since the PET substrate is not dissolved in solvent without a UV source, only the desired areas with proper opening for UV exposure are removed in a vertical fashion. The etch rate varies between 1 and 8 micrometer per minute, depending on the process conditions. Various structures such as micro-gears and interdigital structures have been realized using this approach. Combining this method with electroplating, the fabrication of micro-motors, micro-valves and optical devices would be possible.
Izadi, N., Samak, A., & Mohajerzadeh, S. (2013). ریز ماشینکاری PET با استفاده از لایه برداری شیمیایی در حضور. Journal of Algorithms and Computation, 41(5), 567-576. doi: 10.22059/jac.2013.7879
MLA
Nima Izadi; Amir Samak; Shamsoddin Mohajerzadeh. "ریز ماشینکاری PET با استفاده از لایه برداری شیمیایی در حضور". Journal of Algorithms and Computation, 41, 5, 2013, 567-576. doi: 10.22059/jac.2013.7879
HARVARD
Izadi, N., Samak, A., Mohajerzadeh, S. (2013). 'ریز ماشینکاری PET با استفاده از لایه برداری شیمیایی در حضور', Journal of Algorithms and Computation, 41(5), pp. 567-576. doi: 10.22059/jac.2013.7879
VANCOUVER
Izadi, N., Samak, A., Mohajerzadeh, S. ریز ماشینکاری PET با استفاده از لایه برداری شیمیایی در حضور. Journal of Algorithms and Computation, 2013; 41(5): 567-576. doi: 10.22059/jac.2013.7879
)